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3D CONFOCAL MICROSCOPE
The 3D confocal microscope uses a rotating Nipkow Disk and offers 400 µm range and height resolution down to 1 nm.
Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out-of-focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.
|OBJECTIVE||Z-RESOLUTION||XY RESOLUTION||FIELD OF VIEW||WORKING DISTANCE|
|20X||3 nm||1.16µm||0.89 mm x 0.66 mm||
|50X||2 nm||0.46 µm||0.36 mm x 0.27 mm||
|100X||1 nm||0.23 µm||0.18 mm x 0.13 mm||
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