AREA SENSORS 3D CONFOCAL MICROSCOPE

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3D CONFOCAL MICROSCOPE

The 3D confocal microscope uses a rotating Nipkow Disk and offers 400 mrange and height resolution down to 1 nm.

Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out-of-focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.

OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
20X 3 nm 1.16m 0.89 mm x 0.66 mm

1.0 mm

50X 2 nm 0.46 m 0.36 mm x 0.27 mm

1.0 mm

100X 1 nm 0.23 m 0.18 mm x 0.13 mm

1.0 mm


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AREA SENSORS 3D CONFOCAL MICROSCOPE









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