AREA SENSORS – 3D WHITE LIGHT INTERFEROMETER

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3D WHITE LIGHT INTERFEROMETER

The 3D white light interferometers are available with 3 measurement ranges: 100 µm, 250 µm and 400 µm. The resolution in z-direction is 0.1 nm.

The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.

OBJECTIVE	Z-RESOLUTION	XY RESOLUTION	FIELD OF VIEW	WORKING DISTANCE
2.5X	1 nm	9.24 µm	7.12 mm x 5.34 mm	10.3 mm
5X	1 nm	4.62 µm	3.56 mm x 2.67 mm	9.3 mm
10X	1 nm	2.31 µm	1.78 mm x 1.34 mm	7.4 mm
20X	0.1 nm	1.16 µm	0.89 mm x 0.66 mm	4.7 mm
50X	0.1 nm	0.46 µm	0.36 mm x 0.27 mm	3.4 mm
100X	0.1 nm	0.23 µm	0.18 mm x 0.13 mm	2.0 mm

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