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High vacuum atomic force microscope for failure analysis
Park NX-Hivac allows failure analysis engineers to improve the sensitivity of their measurements through high vacuum Scanning Spreading Resistance Microscopy (SSRM). Because high vacuum scanning offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide range of dope concentration and signal response in failure analysis applications.
Performing Scanning Spreading Resistance Microscopy (SSRM) measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.
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