AREA SENSORS – 3D CONFOCAL MICROSCOPE
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3D CONFOCAL MICROSCOPE
The 3D confocal microscope uses a rotating Nipkow Disk and offers 400 µm range and height resolution down to 1 nm.
Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out-of-focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.
| OBJECTIVE | Z-RESOLUTION | XY RESOLUTION | FIELD OF VIEW | WORKING DISTANCE |
| 20X | 3 nm | 1.16µm | 0.89 mm x 0.66 mm |
1.0 mm |
| 50X | 2 nm | 0.46 µm | 0.36 mm x 0.27 mm |
1.0 mm |
| 100X | 1 nm | 0.23 µm | 0.18 mm x 0.13 mm |
1.0 mm |
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